工程施工技术

原子层沉积TiN/Al2O3多层纳米涂层的制备及层结构对性能的影响

田程浩 (湖南科技大学机械设备健康维护湖南省重点实验室；湖南科技大学机电工程学院), 唐思文 (湖南科技大学机械设备健康维护湖南省重点实验室；湖南科技大学机电工程学院), 张文静 (湖南科技大学机械设备健康维护湖南省重点实验室；湖南科技大学机电工程学院), 种鑫鹏 (湖南科技大学机械设备健康维护湖南省重点实验室；湖南科技大学机电工程学院)

摘要


针对微铣削加工中存在的尺寸效应问题，本研究设计并构建了四种具有不同层状结构的TiN/Al2O3多层纳米涂层体系，首次采用原子层沉积技术（ALD）完成了该系列涂层的制备。通过X射线光电子能谱（XPS）和掠入射Ｘ射线衍射（GIXRD）等方法对纳米涂层的化学成分进行了详细表征。利用摩擦磨损实验机和洛氏硬度计等设备对纳米涂层的性能进行检测，研究了不同层结构对摩擦磨损性能的影响。结果表明：成功制备了纳米尺度的多层结构涂层，基体表面未观察到明显滴状气泡和破损，且涂层表现出优异的结合力。在摩擦磨损性能测试中，耐磨性最好的层结构相较于无涂层基体摩擦系数降低了约23.53%。原子层沉积制备的多层纳米涂层能够提升刀具的力学性能，通过合理的结构设计，可以进一步优化材料的性能表现。

关键词


原子层沉积；多层纳米涂层；摩擦性能；层结构

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参考


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DOI: https://doi.org/10.33142/ect.v3i5.16474

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